Gigaphoton Debuts Neon Recycling System for ArF Excimer Lasers with 50% Recovery Rate

New Neon Recycling System Introduced

Japanese semiconductor lithography tool maker Gigaphoton has introduced hTGM, a new neon gas recycling system designed for its argon fluoride (ArF) excimer lasers. The system has demonstrated a 50% recycling rate for neon gas, with potential for further improvement through configuration adjustments.

Addressing Supply Chain Vulnerabilities

This development aims to mitigate a critical supply chain vulnerability in the semiconductor industry. Prior to 2022, Ukraine supplied up to 50% of the neon gas used in semiconductor manufacturing. The Russian invasion of Ukraine in 2022 led to the cessation of exports from major Ukrainian producers, causing concerns about chip supply.

Neon is crucial for advanced DUV processes, accounting for 70% of global neon production used in semiconductor manufacturing.

Industry-Wide Recycling Efforts

Following the supply disruption, countries like China, Taiwan, and South Korea increased their domestic neon production. Additionally, various chip manufacturers have integrated recycling systems into their fabrication processes. Gigaphoton's system contributes to these efforts by reducing material costs and decreasing reliance on global supply chains.

Other companies are also advancing neon recycling technology; Kanken Techno demonstrated a system with over 90% recycling rate at SemiCon Taiwan, indicating significant potential for future improvements in this area.

Scarcity of Neon Gas

Neon is a noble gas, making it inert and easy to handle, but it is scarce in Earth's atmosphere due to its vaporization properties and limited bonding ability. It is primarily obtained as a byproduct of fractional distillation of super-cooled air. Historically, Ukrainian steel-mill air-separation units produced crude neon, which was then refined domestically.