Russian firm completes first 130nm-capable chipmaking tool, trails modern equipment by 25 years

First Russian 130nm Lithography Tool Completed

The Zelenograd Nanotechnology Center (ZNTC) in Russia has announced the completion of the third R&D stage for its inaugural lithography tool. This equipment is designed to process 200-mm wafers using a 130nm process technology. The tool is currently undergoing internal testing, with mass production use in a fabrication facility still years away.

Industry Significance and Context

Alexander Mikhailov, an analyst with Strategy Partners, stated that the creation of this 130nm-capable photolithography system prototype is an important milestone for Russia's microelectronics industry. It demonstrates the country's engineering expertise in developing such equipment and could facilitate the development of systems for smaller process nodes like 90nm and 65nm. However, the 130nm process technology is approximately 25 years behind current leading-edge chip manufacturing capabilities.

Development and Funding Details

While ZNTC is responsible for the overall project, Belarus-based Planar developed the lithography system itself, including manufacturing mechanical assemblies and components, and commissioning the prototype. Lassard developed the lasers for the unit. ZNTC's responsibilities include overall system development, test and process equipment design, projection-lens calculations, and process modeling. Russia's Ministry of Industry and Trade allocated approximately $70 million for the entire development program.

Cost Comparison

An estimated cost for one 130nm-capable ZNTC stepper is $6.7 million, with its laser light source adding around $600,000, totaling approximately $7.3 million per tool. For comparison, ASML's PAS 5500/150 stepper, launched in Q1 2001, had a list price of $3.1 million, which translates to about $5.8 million today after accounting for cumulative inflation.