● Covered by 1 source · 3 reportsMedium impact3 neutral
China Begins Mass Production of Domestic Immersion DUV Lithography Machines
Key points
- Shanghai Aishengna is mass-producing immersion DUV lithography machines.
- First units to be delivered this year to SMIC, Hua Hong, and CXMT.
- Output targets five machines in 2026 and 20 in 2027.
- Most components are domestic, some critical parts from Japan.
- Machines are for production-line validation, not volume output.
Domestic Production Commences
Shanghai Aishengna Electronic Technology Group, a state-owned company, has started mass production of immersion deep ultraviolet (DUV) lithography machines. The first units are scheduled for delivery this year to SMIC, Hua Hong Semiconductor, and ChangXin Memory Technologies (CXMT). These deliveries are intended for production-line validation rather than immediate volume output.
Production Targets and Manufacturer Details
The production targets for these machines are approximately five units in 2026 and around 20 in 2027. Shanghai Aishengna was established in August 2023 with 7 billion yuan (approximately $1 billion) in registered capital. It is believed to have integrated engineering teams from Shanghai Yuliangsheng Technology and Shanghai Micro Electronics Equipment (SMEE). SMIC has been testing a Yuliangsheng immersion tool since September 2025.
Component Sourcing and Technical Capabilities
While most components in the new systems are domestically sourced, some critical parts still originate from Japan. Delays from local suppliers have impacted output this year. The Chinese tool reportedly prints 28nm-class features in a single exposure and can theoretically reach 7nm. These machines represent about 3.8% of the approximately 130 immersion systems ASML deploys annually, with ASML holding an estimated 98.7% of the total immersion market.
Context of US Restrictions
This development occurs as new U.S. legislation, specifically House Resolution 8170, threatens to cut off Chinese firms from ASML sales and servicing. SMIC, Hua Hong, and CXMT are among the entities designated as restricted in this bill, highlighting the strategic importance of domestic lithography capabilities for China.
✨ This summary was generated by AI from the outlets' reporting listed below. It is not independently verified and may contain errors — check the original sources. How BrevFeed works →
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How outlets covered it
China has started low-volume production of domestically developed immersion DUV lithography machines, with five systems planned for this year and 20 in 2027. These machines are intended for production-line validation at SMIC, Hua Hong, and CXMT, marking a step towards reducing reliance on foreign technology in chip manufacturing.
Shanghai Aishengna Electronic Technology Group has been identified as the state-owned company developing China's first domestic immersion DUV lithography scanners. This development is significant as it represents China's efforts to achieve self-sufficiency in advanced semiconductor manufacturing equipment amidst global supply chain pressures.
A state-backed company in Shanghai has started mass-producing immersion deep ultraviolet (DUV) lithography machines, with initial deliveries expected this year to SMIC, Hua Hong Semiconductor, and ChangXin Memory Technologies. This development marks a significant step in China's efforts to achieve self-sufficiency in chip manufacturing technology, particularly as new U.S. legislation threatens to cut off Chinese firms from ASML sales and servicing.