LG Electronics Production Technology Institute (LG-PRI) has signed a contract with an outsourced semiconductor assembly and test (OSAT) company to supply a maskless laser direct imaging (LDI) lithography tool. This tool is designed for building metal-interconnect patterns in semiconductor packaging. This marks LG's entry into the advanced packaging equipment sector, a growing area in the semiconductor industry.
LG-PRI's LDI system is a maskless lithography machine that patterns fine metal interconnects for advanced semiconductor packaging. The highest-resolution version of the machine can produce 1.5-µm line-and-space (L/S) patterns, suitable for wiring pitches of approximately 3 µm. The production equipment uses a 405-nm laser-diode light source and can process substrates up to 600 × 600 mm.
LG primarily positions its LDI system for advanced semiconductor packaging using organic and glass substrates, displays, and MEMS. It can also be used for high-density printed circuit boards (PCBs) for mobile devices or prototyping. LG is entering an established direct-imaging market but aims to target the higher end with its 1.5-µm line/space capability and competitive pricing strategy.
Laser Direct Imaging (LDI) is a maskless lithography process. Unlike traditional photolithography that uses a physical photomask, LDI employs a laser to directly expose a digitally generated circuit pattern onto a photoresist-coated substrate. This method uses a digitally controlled pattern generator and projection optics, similar to how a digital image is projected onto a screen, but for circuit patterns on photoresist.
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LG Electronics Production Technology Institute (LG-PRI) has signed a contract to supply an OSAT with its maskless Laser Direct Imaging (LDI) lithography tool for semiconductor packaging. This move positions LG in the advanced packaging equipment market, offering a tool that can pattern fine interconnects with potential for higher yields.